SCSP-36D / SCSP-18S | 에스제이이노테크

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ITEM	SCSP-18S	SCSP-36D
Substrate	6 inch Square 156.75×156.75mm ±1.0mm
Lane number	1Lane/Line	1Printing Lane&1Pass Lane/Line
Wafer flow height	950mm ±20mm
Align Accuracy	≤ ±12.5um(Edge detecting) < 8um(Double or Dual Print)
Throughput	1700cells/hour(Max 1800 cells/hour)	3400cells/hour(Max 3600 cells/hour)
Up Time(%)	≥ 97%
Breakage rate(%)	< 0.2%

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SCSP-36D